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SCA100T-D02-PCB
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SCA100T-D02-PCB数据手册
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SCA100T Series
Murata Electronics Oy Subject to changes 1/17
www.muratamems.fi Doc.Nr. 8261800 Rev.B2
Self test 2
Sensing
element 1
Sensing
element 2
SPI interface
Self test 1
Signal conditioning
and filtering
A/D conversion
Signal conditioning
and filtering
EEPROM
calibration
memory
9 ST_2
10 ST_1
12 VDD
6 GND
11 OUT_1
5 OUT_2
1 SCK
3 MISO
4 MOSI
7 CSB
Temperature
Sensor
THE SCA100T DUAL AXIS INCLINOMETER SERIES
The SCA100T Series is a 3D-MEMS-based dual axis inclinometer family that provides instrumentation grade
performance for leveling applications. The measuring axes of the sensing elements are parallel to the mounting
plane and orthogonal to each other. Low temperature dependency, high resolution and low noise, together a with
robust sensing element design, make the SCA100T the ideal choice for leveling instruments. The Murata
inclinometers are unsensitive to vibration, due to their over damped sensing elements, and can withstand
mechanical shocks of up to 20000 g.
Features
Dual axis inclination measurement (X and Y)
Measuring ranges ±30° SCA100T-D01 and
± 90° SCA100T-D02
0.0035° resolution (10 Hz BW, analog output)
Sensing element controlled over damped
frequency response (-3dB 18Hz)
Robust design, high shock durability (20000g)
High stability over temperature and time
Single +5 V supply
Ratiometric analog voltage outputs
Digital SPI inclination and temperature output
Comprehensive failure detection features
o True self test by deflecting the sensing
elements’ proof mass by electrostatic force.
o Continuous sensing element interconnection
failure check.
o Continuous memory parity check.
RoHS compliant
Compatible with Pb-free reflow solder process
Applications
Platform leveling and stabilization
360° vertical orientation measurement
Leveling instruments
Construction levels
Figure 1. Functional block diagram
Product Family Specification
Data Sheet

SCA100T-D02-PCB 数据手册

muRata(村田)
5 页 / 0.26 MByte
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17 页 / 0.49 MByte

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